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Analysis of silicon@ particles for impurities by conversion to monocrystal - by placing in silicon@ vessel and treatment in floating zone to increase sensitivity

机译:通过转化为单晶来分析硅颗粒中的杂质-通过放置在硅容器中并在浮区中进行处理以提高灵敏度

摘要

Analysis of the concn. of impurities in Si particles (I) involves (a) placing (I) in a Si vessel (II); (B) making (I) and (II) into monocrystalline Si (III) in a floating zone; and (c) determining the concn. of impurities present in (III). Prodn. of (III) from (I) involves (a) placing (I) in (II) and (b) treatment of (I) and (II) in a floating zone. USE/ADVANTAGE - For the analysis of trace impurities and gives reproducible results, since (III) is more suitable than (I) for analysis by sensitive techniques. The technique can also be used for purifying the Si by using a moving heat source.
机译:分析concn。 Si粒子(I)中的杂质包括(a)将(I)放入Si容器(II)中; (B)在浮动区中将(I)和(II)制成单晶硅(III); (c)确定concn。 (III)中存在的杂质。产品(I)中的(III)中的(III)涉及(a)将(I)放入(II)中,以及(b)在浮动区中处理(I)和(II)。使用/优势-用于分析痕量杂质并提供可重现的结果,因为(III)比(I)更适合通过敏感技术进行分析。该技术还可以用于通过使用移动热源来纯化Si。

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