High precision position sensor for linear or esp. rotary motion - has flat coils forming inductances moved w.r.t. metal objects, pattern analyser of inductance parameters

摘要

The position sensor has variable inductances in the form of flat coils, esp. made using printed circuit technology, whose inductance depends on the presence of one or more metallic, ferromagnetic or diamagentic objects. The inductances and at least one of the objects are moved relative to each other. There are at least two separate inductances (2, 3, 6) and a device for determining their parameters. A pattern analysis device performs a harmonic analysis of the parameters of the inductances. The results of the pattern analysis are converted into a position value. USE/ADVANTAGE - Esp. for rotary motion. The robust position sensor can detect linear or rotary motion with a hgh degree of precision, is insensitive to dust and fouling and has partic. advantageous manufacturing costs.