Diffraction grating apparatus and method of forming a surface relief pattern in diffraction grating apparatus

摘要

A phase diffraction grating apparatus which is usable to generate an array of N spots, where n is an even integer, and the N spots are substantially equally spaced. The generation of an even number of spots is achieved using a translation symmetry in the grating design. Illustratively, the intensities of the N spots are substantially equal. Binary, multi-level, and continuous phase grating embodiments are disclosed. In the case of the multi-level and continuous embodiments, the uniform intensity is obtained using a reflection symmetry in the grating design.