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Laser ablation method for depositing fluorinated Y-Ba-Cu-O superconducting film having basal plane alignment of the unit cells deposited on non-lattice-matched substrates
Laser ablation method for depositing fluorinated Y-Ba-Cu-O superconducting film having basal plane alignment of the unit cells deposited on non-lattice-matched substrates
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机译:激光烧蚀方法沉积的氟化Y-Ba-Cu-O超导膜,其沉积在非晶格匹配的基板上具有基本面对准
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摘要
A thin film, fluorinated, ceramic defect-oxide type superconducting material grown on a substrate such as sapphire or stainless steel. The superconducting material is characterized by basal plane alignment of the unit cells thereof even though the substrate does not possess a perovskite-type lattice structure. A laser ablation technique is used to evaporate material from a fluorinated pellet of target material to deposit the fluorinated superconducing material on the substrate, which is heated during the deposition process. The instant invention provides for a low pressure and relatively low temperature method of depositing a superconducting film which is characterized by (1) a minimal number of high angle grain boundaries typically associated with polycrystalline films, and (2) aligned a, b, and c axes of the unit cells thereof so as to provide for enhanced current carrying capacities. Further, the method of this invention provides for the deposition of superconducting material without a post deposition anneal. Large area, irregularly shaped rolls of inexpensive substrate material can be uniformly covered by the method described herein.
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