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Low temperature preparation of ultrafine oxide particles using organized reaction media
Low temperature preparation of ultrafine oxide particles using organized reaction media
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机译:使用有组织的反应介质低温制备超细氧化物颗粒
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摘要
The present invention relates to a method for the preparation of ultrafine oxide particles using organized reaction media. Integrated circuit (IC) densities have necessitated the use of ultrahigh purity process fluids in state of the art fabrication facilities. It is the purpose of the present invention to synthesize monodispersed submicron particles of some representative contaminants, such as ultrafine oxide particles, using organized reaction media, and study their characteristics in relation to their removal from process fluids.
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