AUTOMATIC DETECTION METHOD AND DETECTOR FOR ROTATION CENTER POSITION BY FLAT SUBSTRATE AND THREE SENSORS

摘要

PURPOSE: To highly accurately and automatically detect a rotation center of a rotating axis. ;CONSTITUTION: Three non-contact displacement gages 3a to 3c are positioned at vertexes of an equilateral triangle oppositely to a flat substrate 2 attached to an end of a rotating axis 11. Rotation synchronization components are extracted from relative displacement signals between the rotating flat substrate 2 and the displacement gages 3a to 3c to obtain respective phase differences between those components related to adjacent displacement gages among the three synchronization components. As a result, three circles can be drawn where the phase difference is an angle of circumference and the circles pass through center positions (two points) of the adjacent displacement gages, wherein the rotation center of the axis 11 aligns with an intersection of the three circles. Then by means of a high speed calculating circuit 6 for obtaining equations of two circles and their intersection from an output from a phase difference detector 5, a two-dimensional display device 7 for the circle intersection, that is the rotation center coordinate, a hard copy device, etc., high speed automatic detection of the rotation center together with their display and output is done.;COPYRIGHT: (C)1993,JPO&Japio