METHOD OF DETECTING CENTER POSITION OF WIRE BONDING SECTION

摘要

PURPOSE:To improve identification accuracy of wire bonder by detecting the center position of a wire boning section after ball bonding. CONSTITUTION:A tentative center position 8 of a ball is detected by performing macro identification by binary-coaded pattern matching. On the basis of this position 8, an edge of the ball 3 is retrieved at multivalues to the radial direction. Next, the center of gravity of the ball 3 which has been bonded from the edge of the ball 3 is detected, and then the center position of bonding section of a wire 2 is detected after wire bonding. As a result, difference between the position detected in this way and the target position of bonding can be obtained. Consequently, identification accuracy of a wire bonder is improved.