PRODUCTION OF SRTIO3-YBA2CU3O7 AND LAYER SYSTEM COMPRISING SRTIO3 AND YBA2CU3O7

摘要

PURPOSE: To prohibit the unavoidable and uncontrollable growth of the case the thickness of a layer is larger and to produce a high-temp. superconductor composed in a region oriented to a C axis direction as far as possible by incorporating an intermediate layer for embodying the succeeding growth oriented in the controlled C axis direction into a superconducting layer. ;CONSTITUTION: YBa₂Cu₃O₇ is crystal oriented in the C axis direction and grown by a sputtering method using the YBa₂Cu₃O₇ as a target on an SrTiO₃ crystal oriented to (100) as a substrate. If, in this case, the undesirable region oriented to the (a) axis direction appears and a staircase arises on the YBa₂Cu₃O₇ surface between the regions by orientation to the (a) axis and the C axis, the growth of the YBa₂Cu₃O₇ layer is interrupted at a thickness of 500 nm and the SrTiO₃ layer is adhered at a thickness of 20 to 30 nm during the time this staircase is coated. The growth of the YBa₂Cu₃O₇ layer is then continued at a thickness of 300 to 500 nm.;COPYRIGHT: (C)1993,JPO