MOLECULAR BEAM CRYSTAL GROWING APPARATUS AND PROCESS FOR MOLECULAR BEAM CRYSTAL GROWTH USING THE APPARATUS

摘要

PURPOSE: To enable the accurate determination of a substrate temperature by a radiation thermometer during the growth of a crystal by a molecular beam crystal growing process. ;CONSTITUTION: The objective apparatus is provided with a molecular beam source cell 32 placed at a position able to view a substrate 41 held on a substrate holder 31, a chopper 37 placed between the molecular beam source cell 32 and the substrate holder 31 at a position to cover the molecular beam source cell 32 and capable of freely shielding the radiation directing from the molecular beam source cell 32 toward the substrate 41, a radiation thermometer 35 placed at a position to receive the infrared ray generated from the substrate 41 to measure the temperature of the substrate 41 and a phase-detection amplifier 36 connected to the radiation thermometer 35 to perform the detection synchronous to the period of the chopper 37 shielding the radiation from the molecular beam source cell 32.;COPYRIGHT: (C)1993,JPO&Japio