DETERMINATION OF CRYSTAL STRUCTURE AND CRYSTALLOGRAPHIC DIRECTION

摘要

PURPOSE:To enable simple and accurate determination of crystal structure and crystallographic direction by irradiatings crystalline surface with a light beam to get a reflecting beam image of specific pattern corresponding to a grid surface shape. CONSTITUTION:A light beam from a light source 2 is applied to an etched surface of silicon wafer and therewith crystal structure and crystallographic direction are determined, utilizing the characteristic that the intensity of reflected beam is different by each specific direction and reflecting beam image 3 shows a specific shape such as a cross.