RUTHERFORD REAR SCATTERING SPECTRAL ANALYSIS DATA ANALYSIS METHOD

摘要

PURPOSE: To enable a distribution of an element composition of a sample surface in depth direction to be analyzed accurately by simulating a theoretical spectrum. ;CONSTITUTION: A sample is divided into 100 or more layers and then a virtual sample element concentration is input to each layer. The amount of energy which an incidence ion and an ion after scattering loses within the sample is calculated for each set layer. Then, for enabling an ion species which is optimum for analysis purpose to be applied, a stop power of an irradiation ion within a solid sample is calculated for any combination of various kinds of irradiation ions and sample constitution elements and a scattering ion can be simulated for any ion species. An intensity of the scattering ion is calculated from an element concentration of each layer and the ion scattering cross section. Therefore, a scattering section area data base is created and a spectrum of the scattering ion is simulated according to the obtained scattering cross section.;COPYRIGHT: (C)1993,JPO&Japio