SUBSTRATE TRANSFER MECHANISM OF DUST-PARTICLE EXISTENCE INSPECTION APPARATUS

摘要

PURPOSE: To position a substrate in the prescribed position of an inspection stage in a fixed manner by a method wherein a corner-part pressing utensil is moved in the diagonal-line direction of the substrate according to the separation movement of one pair of forks. ;CONSTITUTION: A corner-part pressing mechanism 27 which presses a corner part on one side of opposite corners of a substrate 9 and which brings two sides of a corner part on the other side of the opposite corners to a positioning member 51 on the side of a stage is attached to the side of a fork 24 on one side. At the same time, a corner-part pressing utensil 28 at the corner-part pressing mechanism 27 is installed so as to be capable of being moved freely to a substrate taking-out direction with reference to the fork 24 on one side. A movement mechanism 29 which moves the corner-part pressure utensil 28 at the corner-part pressing mechanism 27 to the side of the base part of the fork 24 so as to work in conjunction with the separation movement of one pair of forks 24, 25 is installed. Thereby, when the corner part of the substrate transferred to the inspection stage is pressed toward the positioning member on the side of the inspection stage, the substrate can be positioned accurately in the prescribed position of the inspection stage.;COPYRIGHT: (C)1993,JPO&Japio