SYSTEM FOR MEASURING SURFACE-PHYSICAL-PROPERTY VALUE AND SURFACE-CHARACTERISTIC VALUE OF CONTINUOUS PROCESS MATERIAL

摘要

PURPOSE: The surface-physical-property value and the surface-characteristic value of a process material and their measuring positions are measured accurately on line at the arbitrary positions of a continuous process line. ;CONSTITUTION: A plurality of radiation thermometers 14A-14N are arranged along a continuous process line. The measuring height and the measuring angle of each thermometer can be varied and can be detected. The ratio of the power of emissivities is operated by using luminance temperatures S1 and S2 at wavelengths 1 and 2 obtained with the radiation thermometers. The correlation data between the thickness of an oxide film (surface characteristic value) and the ratio of the power of emissivities, which are formed by off line based on experiment data, theory or the like, are applied, and the oxide-film thickness d_k at an arbitrary measuring position is obtained. The measuring position is computed based on the measuring height and the measuring angle of each radiation thermometer.;COPYRIGHT: (C)1993,JPO&Japio