PURPOSE:To recognize the form of the ion beam and the overall density distribution of the ion beams easily and securely by providing an ion beam spot form recognizing device to an ion implanter, and providing a beam current detecting means furnishing a specific beam input port, and a detecting result display means. CONSTITUTION:An ion beam spot form recognizing device which can set the ion beam to an optional radiating position is provided to an ion implanter. And by a spot Faraday 1 having a beam input port 1a smaller than a spot area of the ion beam 2, the beam current at each part of the ion beams 2 is sectioned and detected in a plane form. Then, the detecting result is displayed in a plane form corresponding to the preset radiating position on a display means 5 by a scanning address. As a result, by dividing the scanning address minutely, the form of the ion beam 2 and the overall density distribution of the ion beams can be recognized easily and securely. Consequently, the load of the measuring person can be reduced.
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