SUPERPRECISION MIRROR SURFACE WORK METHOD

摘要

PURPOSE: To mirror surface-polish a worked surface without generating distortion, crack, thermal deterioration, etc., by generating a suspension flow in a direction along a fine region of the worked surface and also parallelly arranging a workpiece relatively in a direction tilted at a predetermined angle in a 0 to 90° range relating to the axial direction of a work unit. ;CONSTITUTION: A long scale column-shaped work unit 1 is rotated while pressed by a fixed load to a plane-shaped worked surface 4 of a workpiece 2 to roll-in a suspension 5, uniformly dispersing superfine particles 3, between the work unit 1 and the worked surface 4, and the superfine particles 3 pass one after another in a direction along the worked surface 4 to perform surface work without causing deterioration by mutual action by one kind of chemical binding in an interface between the superfine particle 3 and the worked surface 4. Further, the workpiece 2 is relatively moved in a direction tilted at a predetermined angle in a 1 to 90° range with an axial direction of the work unit 1 serving as the reference, and an influence by an irregular streaks, numerously formed along a circumference of the work unit 1 by a limit of work accuracy at the time of manufacturing the work unit 1, is removed to superaccurately mirror- surface polish the worked surface 4.;COPYRIGHT: (C)1993,JPO&Japio