首页> 外国专利> METHOD OF CONTROL OF THE MAGNETIC PROPERTIES OF A MAGNETIC LAYER OF FINE FILM RECORDING, MAGNETIC RECORDING HARD DISK AND MANUFACTURING METHOD OF THE SAME

METHOD OF CONTROL OF THE MAGNETIC PROPERTIES OF A MAGNETIC LAYER OF FINE FILM RECORDING, MAGNETIC RECORDING HARD DISK AND MANUFACTURING METHOD OF THE SAME

机译:精细记录磁层的磁特性的控制方法,硬盘磁记录及其制造方法

摘要

The magnetic properties of a cobalt based, thin film, magnetic recording layer (14) are controlled, independent of controlling the process for depositing the magnetic layer itself, by the introduction of process compatible dopant gases into an argon atmosphere during the vacuum deposition (i.e. a sputtering process or an evaporation process) of a chromium based underlayer (15) upon which the magnetic layer (14) is subsequently deposited. The same or a different dopant may also be introduced into the magnetic layer. The process compatible dopant gases described contain oxygen, nitrogen and/or carbon, and mixtures thereof, and include the group purified air, oxygen, nitrogen, a mixture of oxygen and nitrogen, carbon monoxide, carbon dioxide, methane and water vapor. IMAGE
机译:通过在真空沉积过程中将与工艺兼容的掺杂剂气体引入氩气气氛中,从而控制钴基薄膜磁记录层(14)的磁性能,而与控制磁层本身的沉积工艺无关铬基底层(15)的溅射工艺或蒸发工艺),随后在其上沉积磁性层(14)。相同或不同的掺杂剂也可以引入磁性层中。所描述的与工艺兼容的掺杂剂气体包含氧气,氮气和/或碳及其混合物,并且包括净化的空气,氧气,氮气,氧气和氮气的混合物,一氧化碳,二氧化碳,甲烷和水蒸气。 <图像>

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