PROCESS AND APPARATUS FOR LASER INTERFERENCE MEASURING OF LENGTHS IN TWO PERPENDICULAR COORDINATES WITH THERMAL EXPANSIVITY COMPENSATION

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  机译： 热膨胀补偿的两种正交坐标下激光干扰长度的测量方法和装置

• 4. ABSOLUTE POSITION MEASURING METHOD OF LASER INTERFERENCE LENGTH MEASURING APPARATUS, AND LASER INTERFERENCE LENGTH MEASURING APPARATUS [P] . 日本专利： JP2012132820A . 2012-07-12

  机译： 激光干涉长度测量装置的绝对位置测量方法和激光干涉长度测量装置

• 5. LASER INTERFERENCE LENGTH MEASURING APPARATUS AND LASER INTERFERENCE LENGTH MEASURING METHOD [P] . 日本专利： JP2010002244A . 2010-01-07

  机译： 激光干扰长度测量装置和激光干扰长度测量方法

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