HARD AND LUBRICANT THIN FILM OF AMORPHOUS CARBON-HYDROGEN-SILICON, IRON BASE METALLIC MATERIAL COATED THEREWITH, AND THE PROCESS FOR PRODUCING THE SAME

摘要

A hard and lubricant thin film of amorphous carbon-hydrogen-silicon and a process for producing the same. The thin film comprises carbon and hydrogen as major components, the balance mainly containing a silicon-based material, and it contains diamond-like carbon. The content of hydrogen is from 30 to 50 % by atomic and the content of carbon is 70 % by atomic or more with respect to the total composition except hydrogen. An iron-based metallic material having the thin film of amorphous carbon-hydrogen-silicon formed thereon and a process for producing the same are also provided. The iron-based metallic material is very hard and has a small coefficient of friction.