Method of detecting minute gas component in ambience and applied devices

摘要

To provide a method of environment monitor capable of detecting a minute gas component for monitoring an ambience, and various systems including a gas detector (1). According to the present invention, a method and various systems using the same method are provided in which a sensor for applying an ultrasonic vibration to a thin film (4) formed on a piezoelectric substrate (2) to measure the frequency change of a surface acoustic wave is used to detect a minute gas with high sensitivity. The change of a material in an ambience can be measure by use of this gas sensor.