Process for producing stepped moulds, stepped moulds and stepped body having a microstructure moulded therewith

摘要

2.1 Stepped mould inserts are produced by using patterned irradiation masks having regionally different absorption for X-rays; this requires extensive calculations. It is also possible to use a plurality of masks in succession and to change the penetration depth of the X-rays for each irradiation step; these masks have to be positioned with a high precision. The novel process is used to produce stepped mould inserts in a simple manner. …??2.2 A plurality of layers having different thicknesses and alternately made of non-conductive and conductive material is applied to a metal plate. The layer stack is prepatterned by mechanical precision machining at regionally different depths, is filled with a resist material and is preferably irradiated through a single patterned mask. After "development" of the resist layer, metal is electrodeposited in the micropattern, and the metallic mould insert is separated from the resist structure. …??2.3 Production of micropattern bodies having a multi-step structure.