METHOD AND APPARATUS FOR PRODUCING MULTI-COMPONENT ION DEAM

摘要

This invention relates to accelerators, and 1-gmenno to methods and devices used in the radiation solid-state physics, in particular for the simulation of reactor po- - vrezhden1sh ion beams structural materials, as well as for ion implantation. The aim of the invention is to increase the amount of com- ponentovvionnogo predetermined beam energy and variety. The apparatus comprises a source metal ionop, poluche11I51 system for a multicomponent gas ion beam, prsdstav.p yu1tsuyu a row singly ltochnikov gas ions, a focusing lens system sov- meschengsh ionitlh schgchkov, system foku- .sirovki mixed beam with an accelerating tube ispytyutaemym sample Dr. megdennpm tank high laziness. alignment system made in the form povorottgogo magnet is provided with the lip and located in a vacuum chamber. Bottom discharge emission chamber with a source of metal ions is set in a slit gap IU spolyusnom alignment magnet system, the location of the discharge chamber defined radiusa1 1 and the calculated rotational angles and the required grade of ion beams in the magnet field system po.1tucheni multicomponent gas ion beam system is positioned alignment The output ustanovleya slit on the ion optical axis of the accelerating tube at a location where the optical image aligned emissive source slots metal ions and system for producing multicomponent beam and gas ions. In each of sources modules Cove gas ions napuskaets gas. Thus corbelling vedets gases in the order of their atomic weights ubshani as the distance from the magnetic separator. At modules supplied potential difference. The ratio corresponds to the potential differences relative atomic weights of one shot dnyh the admitted ions cans, in each of the modules is ignited arc plasma koto-- swarm 8 consists essentially of ions of gas filled in an each module. Consequently, at the output of a system for producing multicomponent gas ion beam of the ion beam is obtained, consisting of several components ,: pulses are such that they have the same radii of the turns in the magnetic separator chamber 2 ri - F-.PY. 2 yl. (A Joint Venture CX) to (UD