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Planar integration method of crossover broadband network using acute prism array

机译:使用锐棱镜阵列的交叉宽带网络的平面整合方法

摘要

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a planar integration method of a free space optical system and more particularly to a planar integration method of a crossover switching network that has been implemented in a large scale by spatially arranging individual optical elements such as mirrors, The optical system of a conventional crossover distribution network is mainly composed of a mirror, a lens, a beam splitter prism, and the like in general. , Which results in a large overall size and difficulty in achieving an alignment accuracy of less than 1 m for the optical components for the construction and maintaining the alignment after construction It has a very difficult disadvantage.;Therefore, an optical crossover distribution network that can be used in this switching network can be realized only if the alignment accuracy of 1 m or less and the optical system can be claimed at a smaller scale.;The object of the present invention is to provide a planar integration method of a crossover broadband network with high alignment and wafer scale based on the planar integration technique of an optical system using lithography technology for manufacturing an electronic integrated circuit in order to satisfy the conventional requirements And more particularly to provide a planar integration method of a crossover broadband network in which an optical signal connection characteristic of a crossover interconnect network is sketched by using an acute angle prismarray.
机译:自由空间光学系统的平面积分方法技术领域本发明涉及一种自由空间光学系统的平面积分方法,更具体地,涉及一种通过在空间上布置个体来大规模实现的交叉交换网络的平面积分方法。通常,传统的交叉分配网络的光学系统主要由反射镜,透镜,分束棱镜等组成。 ,这导致大的整体尺寸,并且难以使用于构造的光学部件的对准精度小于1 m,并且难以在构造之后保持对准。这具有非常困难的缺点。仅在对准精度为1m或更小并且可以要求更小的光学系统的情况下,才可以在该交换网络中使用这种方法。本发明的目的是提供一种交叉宽带网络的平面集成方法。基于光学系统的平面集成技术的具有高对准度和晶片规模的光学系统,该光学系统使用光刻技术制造电子集成电路以满足常规要求,更具体地说,提供一种交叉宽带网络的平面集成方法,其中光交叉互连网络的信号连接特性由usin绘制g锐角棱镜阵列。

著录项

  • 公开/公告号KR930013768A

    专利类型

  • 公开/公告日1993-07-22

    原文格式PDF

  • 申请/专利权人 경상현;

    申请/专利号KR19910024778

  • 发明设计人 송석호;이일항;김경헌;

    申请日1991-12-28

  • 分类号G02B7/00;

  • 国家 KR

  • 入库时间 2022-08-22 05:04:05

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