DEVICE FOR MEASURING HETEROGENEOUS RECOMBINATION OF FREE ATOMS AND RADICALS ON THE SURFACE OF SOLID BODIES

摘要

The inventive device comprises a closed measuring chamber, which is introduced into the cylindrical tube with the second placement inside the movable substrate with sockets for samples channels connected to the measuring chamber, a vacuum pump and discharging the bottom of the tube, the inductor is placed inside the high frequency generator, razmo shte n- ny holder within the chamber with a phosphor and a photodetector optically coupled to the phosphor and connected to the recording unit, wherein at the tube surface bounded chamber formed of, .. 6 to n o " ra m e s scho nn oo n odes phosphor, and apertures, ueHtpbi are located on one straight with center c "and, with their total area of ​​less than ten paiv window area. 2 yl.