METHOD OF INCREASE OF ELECTRIC STRENGTH OF INSULATION GAPS IN VACUUM

摘要

use: u0434u043bu00a0 u043fu043eu0432u044bu0448u0435u043du0438u00a0 electric strength and reliability of vacuum equipment and devices. method u043fu043eu043bu0437u0432u043eu043bu00a0u0435u0442 increase the efficiency of the process. the processing of the surface of the electrodes u043eu0441u0443u0449u0435u0441u0442u0432u043bu00a0u044eu0442 u0444u043eu043au0443u0441u0438u0440u043eu0432u0430u043du0438u0435u043c u043fu0435u0440u043fu0435u043du0434u0438u043au0443u043bu00a0u0440u043du043e directed to the surface of the laser beam with a density of energy accurate u0434u043bu00a0 u043eu043fu043bu0430u0432u043bu0435u043du0438u00a0 surface 1, table 2).