Gas supply system for excimer laser - involves using crystalline noble gas-halogen cpd. as halogen source avoiding use of externally supplied gaseous components

摘要

In a system for supplying an excimer laser with a laser gas comprising a halogen gas, a noble gas and a buffer gas, the laser has several gas entry openings, at least one entry opening ensuring laser gas introduction into the laser. The laser is connected to a piping network in which transport of the individual gas components in the pipelines is regulated by valves, one pipeline supplying the noble gas and the buffer gas and a vacuum pump being connected to the network. All the pipelines are solid connection pipes and/or plastic hoses and all the connections are gastight. The halogen gas supply pipeline of the network is connected to a container (5) filled with a crystalline cpd. of halogen and noble gas, pref. XeF2, XeF4 or KrF2. ADVANTAGE - The system avoids use of an externally supplied gaseous halogen component (thus improving safety e.g. in medical applications), provides simple and safe gas-filling of the laser, extends the lifetime of the gas-filling and ensures simple and safe operation of the laser.