METHOD FOR PRODUCING SI (DOWN ARROW) 3 (DOWN ARROW) (UP ARROW) N (UP ARROW) (DOWN ARROW) 4 (DOWN ARROW), NEW OUTPUT CONNECTION THEREFOR, AND METHOD FOR THE PRODUCTION THEREOF

摘要

The present invention relates to a process for the production of low-needle silicon nitride of high (alpha)-content, wherein an amorphous nitrogen-containing silane compound is mixed with a crystalline or amorphous compound comprising the elements silicon, phosphorus and nitrogen to form a mixture which is heat-treated at temperatures above 1000 degrees C. to form the low-needle silicon nitride. The present invention also relates to the silicon-, nitrogen- and phosphorus-containing compound which is used as the starting material in the process for the production of the low-needle silicon nitride, and the process for the production of the silicon-, nitrogen- and phosphorus-containing compound.