Integrated sensor for pressure or acceleration measurement - is constructed exclusively from silicon@ in form of spring-mass system with errors due to differential thermal expansion eliminated

摘要

The IC sensor for the measurement of pressure or acceleration has a cantilever construction comprising a fixed anchorage (21) and seismic mass (20) connected by a flexible region (1). A resistance element (3) formed from single crystal silicon deflects under the action of the cantilever spring/mass system and its inherent piezo-electric properties constitute the basis of measurement. The sensor as a whole is made up exclusively from silicon wherein the variously dosed n or p conducting regions form the protective layer (8) and necessary connections (9) to the insulated (23) metallic contacts (22) for signal take-off. ADVANTAGE - Active parts are formed wholly from silicon and are therefore free from effects of differential thermal expansion. Accuracy and sensitivity of response are increased.