Contactless measurement of static and dynamic deformation of micro-mechanical structures eg bridge or membrane - projecting laser line pattern perpendicular and at angles to surface and evaluating surface lines in real=time

摘要

The method involves directing (3) a linear pattern (2) towards the structure (1) which performs vibration motions among others. The illuminated lines are detected perpendicularly and at an angle to the surface during deformation. The corresp. measurement signals are fed into an evaluation unit (5,7,8) and evaluated in real time. The angle of incidence of the projected line pattern is a constant 45 deg. to the undeformed structure during the measurements. USE/ADVANTAGE - E.g. for measuring force, deformation and vibration frequencies of micro-mechanical elements. Enables entire deformation line and its dynamic variations to be measured in real time.