Anode for HF supported DC glow discharge - forms anode from coil and capacitor plate series resonant circuit, with plate consisting of electrically conducting container wall and insulation layer.

摘要

The anode is combined with an electrical oscillation circuit. The anode is provided by a coil (3) in a series oscillation circuit and by one plate (2) of a plate capacitor which uses the wall of the electrically conductive vessel for the glow discharge and an intermediate insulation layer (1). Pref. the coil windings lie in a plane parallel to the plate (2) and can be provided by a wound wire permanently attached to the surface of the plate. The insulation layer (1) is made of Al2O3 or ZrO. USE/ADVANTAGE - Eg for plasma cleaning or deposition. Simple mechanically stable anode with combined oscillation circuit. Does not require active cooling, or variable capacitor since stray capacitance is only due to supply leads.