Differential pressure sensor e.g. for vehicle fuel tank - contains two semiconducting membranes with sensor elements on upper sides in common reference chamber, lower sides exposed to different pressures

摘要

The differential pressure sensor contains at least one semiconducting membrane (45) with at least one sensor element (50) formed on its upper side. The lower side of the membrane is exposed to one of the two pressures (p1) forming the differential pressure. A second membrane (46) with at least one sensor element on (51) its upper side is exposed on its lower side to the second pressure (p2). The sensor elements are connected so as to form a difference. The upper sides of the membranes are arranged in a common reference chamber (52). ADVANTAGE - Simple, suitable for use in aggressive and corrosive media.