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Phatoresist dispensing system

机译:配药师配药系统

摘要

In a liquid dispensing system, two pouches containing a liquid to be dispensed are connected by tubing to a reservoir and positioned at different levels above the reservoir. As the liquid is dispensed from the reservoir, the higher of the two positions is emptied and replaced with a filled pouch. The pouches are then reversed, with the new pouch in a lower position. When the other pouch is empty, it is replaced and the positions of the two pouches are again reversed. As a result, a continuous supply of liquid is dispensed from the reservoir. Any bubbles which are introduced into the system when the pouches are changed are automatically allowed to escape the system via a liquid level indicator line. A second level indicator provides an alarm or other signal should the liquid fall to the level of the reservoir.
机译:在液体分配系统中,两个装有待分配液体的小袋通过管道连接到容器上,并位于容器上方的不同位置。当从储液器中分配液体时,两个位置中的较高位置将被排空并用装满的小袋代替。然后将小袋翻转,使新的小袋处于较低位置。当另一个包装袋为空时,将其更换,然后将两个包装袋的位置再次颠倒。结果,从储存器中分配出连续的液体供应。更换小袋时引入系统的任何气泡都将自动通过液位指示器管线逸出系统。如果液体跌落到储液罐的液位,第二液位指示器会发出警报或其他信号。

著录项

  • 公开/公告号US5169028A

    专利类型

  • 公开/公告日1992-12-08

    原文格式PDF

  • 申请/专利权人 ADVANCED MICRO DEVICES INC.;

    申请/专利号US19910720348

  • 发明设计人 PEDRO R. MORRISON;

    申请日1991-06-25

  • 分类号B67B7/00;

  • 国家 US

  • 入库时间 2022-08-22 04:59:03

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