Fluid sensing device having reduced attenuation of shear transverse waves

摘要

A fluid sensing device such as a Shear Transverse Wave device or a Love Wave device having a wave-trapping structure that provides tight surface trapping at transduction and sensing regions, but permitting a deeper penetration of wave energy at the interface of a seal with the wave-trapping structure. In the STW device, wave-trapping fingers are selectively varied in thickness, width or both to achieve the selective trapping. In an LW device, a wave-trapping plate is reduced in thickness at seal regions.