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Selected methylol-substituted trihydroxybenzophenones and their use in phenolic resin compositions and processes of forming resist images
Selected methylol-substituted trihydroxybenzophenones and their use in phenolic resin compositions and processes of forming resist images
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机译:选定的羟甲基取代的三羟基二苯甲酮及其在酚醛树脂组合物中的用途和形成抗蚀剂图像的方法
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摘要
A methylol-substituted trihydroxybenzophenone of the formula (I): ##STR1## This methylol-substituted trihydroxybenzophenone may be reacted with selected phenolic monomers during or after the formation of a phenolic novolak resin thereby said resin having at least one unit of formula (II): ##STR2## wherein R and R.sub.1 are individually selected from hydrogen, a lower alkyl group having 1 to 4 carbon atoms or a lower alkoxy group having 1 to 4 carbon atoms.
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