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ma - ku position detection device

机译:马 - 哭position detection device

摘要

PURPOSE:To make it possible to detect a mark position regardless of noises, by performing impulse-response operation of the difference signal or the added signal of two signals from a mark without a differential circuit, and obtaining the position of the mark and the width of the mark based on the peak value. CONSTITUTION:An impulse-response operating circuit 11 receives the difference signal from an operating circuit 4 and performs impulse response operation. A maximum-value/minimum-value detecting circuit 12 receives the output of the impulse-response operating circuit 11 and detects the maximum value and the minimum value. In place of a differential circuit, the impulse-response operation is performed, and the central position of a mark and the peak of the signal are emphasized based on the detected signal. Therefore, the position of the mark and the width of the mark can be obtained based on the output of the maximum-value/minimum-value detecting circuit 12. Thus the mark position can be detected regardless of noises.
机译:目的:为了通过无差动电路对来自标记的差分信号或两个信号的加法信号进行脉冲响应运算,并获得标记的位置和宽度,从而能够不受噪声影响地检测标记位置基于峰值的标记。组成:脉冲响应运算电路11接收来自运算电路4的差信号并执行脉冲响应运算。最大值/最小值检测电路12接收脉冲响应运算电路11的输出,并检测最大值和最小值。代替差动电路,执行脉冲响应操作,并且基于检测到的信号来强调标记的中心位置和信号的峰值。因此,可以基于最大值/最小值检测电路12的输出来获得标记的位置和标记的宽度。因此,可以与噪声无关地检测标记的位置。

著录项

  • 公开/公告号JPH0682607B2

    专利类型

  • 公开/公告日1994-10-19

    原文格式PDF

  • 申请/专利权人 NIPPON ELECTRON OPTICS LAB;

    申请/专利号JP19870202688

  • 发明设计人 IIDA NOBUO;OKINO TERUAKI;

    申请日1987-08-13

  • 分类号H01L21/027;G01B15/00;G03F9/00;H01L21/68;

  • 国家 JP

  • 入库时间 2022-08-22 04:56:20

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