EXCIMER LASER BEAM MACHINING METHOD, EXCIMER LASER BEAM MACHINE TO EXECUTE THE METHOD, AND RESIN FILM FORMED BY THE MACHINE

摘要

PURPOSE:To prevent the material to be machined from being damaged, and to execute the machining with high precision by absorbing or scattering the excimer laser beam transmitted through the holding member. CONSTITUTION:The reflection of a holding member 21 of the excimer laser beam passing through a film 12 at the holding surface 21a is prevented by a reflection preventing film, and the energy density of the excimer laser beam is reduced by diffusing the transmitting excimer laser beam between the holding surface 21a and the rear surface 21b to be attenuated to the energy level below the threshold. The surface 22a of a supporting body 22 absorbs or scatters the excimer laser beam, and the energy of the excimer laser beam reflected in the direction of the film 12 is further attenuated. This constitution prevents the rear surface 12c of the film 12 from being damaged by the excimer laser beam reaching the rear surface side 12c of the film 12, and improves the machining precision of the film 12.