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In the frame transfer image pickup device, in the surface channel tupple the manner null which produces the anti blooming diode which it can be brought together
In the frame transfer image pickup device, in the surface channel tupple the manner null which produces the anti blooming diode which it can be brought together
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机译:在帧传输图像拾取装置中,在表面通道中以零方式产生可将其聚集在一起的防起霜二极管
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摘要
A process for forming an anti-glare diode associated with a surface canal which consists in depositing a first layer of a dielectric material on a silicon substrate then depositing on this first layer a second polycrystalline silicon layer, etching by a photolithographic process the second silicon layer so as to bare the dielectric layer in two zones, a first zone defining the space for formation of the diode, a second zone defining a volume canal zone, a third zone defining the surface canal being protected by the remaining silicon, implanting impurities in the volume transfer canal zone and masking the volume transfer canal zone while leaving the zone reserved for the diode uncovered so as to bare the substrate in the zone reserved for the diode and depositing a second polycrystalline silicon layer on the whole formed by the bared part of the substrate, the second silicon layer and the dielectric and etching the second or both silicon layers so as to form the gate.
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