Evaporation thing adhesion prevention device null to the non evaporation aspect in physical evaporation treatment

摘要

PURPOSE:To prevent the vapor deposition on one surface not to be vapor-deposited and to recover an ineffective vapor-deposited material by passing an endless belt through a vapor deposition region while bringing the belt into close contact with the one surface not to be vapor-deposited when a metal is vapor-deposited on the other surface of a strip metal by physical vapor deposition (PVD). CONSTITUTION:A strip metal 3 such as a silicon steel sheet is traveled above a vapor deposition source 2 consisting of a vapor deposition metal such as Al and Ti in the direction as shown by the arrow A in a vacuum deposition chamber 1, and the vapor of Al, Ti, etc., from the vapor deposition source 2 is deposited on the surface 3a. At this time, the endless belt 4 is traveled by auxiliary rolls 5a, 5b, and 5c at the same speed as the strip metal in the direction as shown by the arrow B while bringing the belt into close contact with the rear surface of the strip metal 3 to be vapor- deposited. The vapor deposition metal is not deposited on the rear surface of the strip metal 3 because of the presence of the endless belt 4, and the metal deposited on the endless belt 4 is scraped off by scrapers 6a and 6b and efficiently recovered in recovery boxes 7a and 7b.