ANALYZING AND DETERMINING METHOD FOR NOVOLATILE IMPURITY IN ULTRA-PURE WATER

摘要

PURPOSE:To analyze and determine constituents and concentration with improved sensitivity and accuracy by condensing an extremely small amount of nonvolatile impurity in ultra-pure water without being affected by contamination from the surrounding. CONSTITUTION:Ultra-pure water 1 sampled continuously from a supply line 8 is supplied to an atomizer quantitatively and is atomized into a clean air 2 to become multiple dispersion liquid drops 3. Then, the generated liquid drops 3 are sent to an evaporation drying pipe 6 and water contents are evaporated completely by a clean hot air 5 at a high temperature (120 deg.C) in the pipe, thus causing a non-volatile impurity which is a residue after evaporation to become a dried particle 7. Then, after the dried particle 7 is captured by a membrane filter installed at the exit of the evaporation drying pipe 6, the surface of the membrane filter capturing he dried particle 7 is subjected to spectral analysis using a spectral analyzer such as a scanning micro auger electron spectroscope, thus analyzing and determining the constituent of non-volatile impurities in ultra-pure water.