TRANSPORTABLE CONTAINER, STANDARDIZED MECHANICAL INTERFACE POD AND STANDARDIZED MECHANICAL INTERFACE SYSTEM

摘要

PURPOSE: To provide an improved transportable container, an SMIF(standardized mechanical interface) pod, and an SMIF system. ;CONSTITUTION: This is a sealable, transportable container which has an improved pod liner, and is provided with a box 20, a box door 32, and a gasket 55 which forms a seal between the box 20 and the box door 32. The box door 32 has a conductive liner and a conductive path from the conductive liner to the ground potential for discharge prevention. A film for interrupting the gasket from the internal region 21 of the container is glued to,the gasket and the container liner. It does not matter if this film is impermeable to a gas and prevents the gas generation of the gasket, or if this film is impermeable to particles not a gas, and prevents granular substances to be produced by the gasket from entering the internal region of the container.;COPYRIGHT: (C)1994,JPO