DEVICE FOR ANALYZING AND INSPECTING VERY-THIN LATERALLY HETEROGENEOUS BODY LAYER IN LATERAL DIRECTION

摘要

PURPOSE: To observe the inspection area of a material layer both laterally extremely thin and heterogeneous with the visual field of an ordinary optical microscope vertical to material surface by resolving and inspecting the layer. CONSTITUTION: The change of thickness is laterally resolved and inspected, regarding a laterally heterogeneous and extremely thin material layer 5, particularly a material layer 5 resulting from singular bonding with a mating component free from (not bonded to) the material layer 5. An optical image system 11 is formed out of the material layer 5 as a first layer 20 and a second layer 21 adjacent thereto, and extended in parallel with flat surface 18a in an inspection area on the flat surface of a substrate 18. The inspection area 10 of the material layer 5 is projected to an image plane via the arrangement of an optical coupling part at a position 25 for coupling excitation light incident on and entering the second layer 21, and at the prescribed emission angle for detection light 26 to be away from coupling with the second layer 21.