SPIRAL TYPE SLOW-WAVE CIRCUIT STRUCTURE AND ITS MANUFACTURE

摘要

PURPOSE: To prevent a decrease in the electric resistances of diamond films and to enhance their output and reliability by preventing nitrogen (N) diffusion to the diamond films from P-BN columns in providing the artificial diamond films on the columns P-BN columns of a spiral type slow-wave circuit structure. ;CONSTITUTION: Interlayers comprising TiC layers 8, 9, 10 are provided between columns made of P-BN, 2, 3, 4 and artificial diamond films 5, 6, 7. Thus, nitrogen (N) diffusion to the artificial diamond films 5, 6, 7 is prevented to prevent a decrease in electric resistances of the diamond films 5, 6, 7.;COPYRIGHT: (C)1994,JPO&Japio