LIGHT ABSORPTION COEFFICIENT MEASURING METHOD AND LIGHT ABSORPTION COEFFICIENT MEASURING DEVICE

摘要

PURPOSE: To obtain a measuring method for accurately measuring absorption coefficient by one time measurement for a material such as thin film having a low absorption coefficient. ;CONSTITUTION: Behind a thin film 2 formed on a base 1, a reflector 3 having a high reflectivity is arranged. Light is introduced from the front of this thin film 2 and, by measuring the reflection light L1 from the thin film 2 and the reflection light L2' refelcted by the reflector 3 via the thin film 2, light absorption coefficient of the thin film 2 is measured.;COPYRIGHT: (C)1994,JPO&Japio