ADJUSTING METHOD OF REFERENCE POSITION OF CCD CAMERA IN IC TESTING APPARATUS EQUIPPED WITH CCD CAMERA

摘要

PURPOSE: To simply and accurately adjust a reference position by a method wherein a contact chuck in which a counterbored hole having a strict fitting size has been formed is used as one part of a calibration jig. ;CONSTITUTION: A counterbored hole 54 having a strict fitting size to a circuilar jig 53 is formed in the central position of a contact chuck 52 for calibration. The counterbored hole 54 is connected to a suction hole used to suck an IC. Also the contact chuck 52 itself is fixed to an X-Y arm at an X-Y conveyance divide in a state that it has been positioned with high accuracy by means of a guide pin 51. When a calibration jig constituted in this manner and an operating program for calibration are used, the suction height of the IC on a buffer stage 2 and the relative relationship between a CCD camera 12 in a contact height and the suction center of the IC are measured. Then, a calibration operation is executed in respective heights.;COPYRIGHT: (C)1993,JPO&Japio