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APPARATUS FOR PRODUCTION OF NONLINEAR LIQUID CRYSTAL DISPLAY ELEMENT AND PRODUCTION OF NONLINEAR LIQUID CRYSTAL DISPLAY ELEMENT
APPARATUS FOR PRODUCTION OF NONLINEAR LIQUID CRYSTAL DISPLAY ELEMENT AND PRODUCTION OF NONLINEAR LIQUID CRYSTAL DISPLAY ELEMENT
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机译:用于生产非线性液晶显示器元件的设备和用于生产非线性液晶显示器元件的设备
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PURPOSE: To decrease the contact resistance at the boundary between metal tantalum and a transparent conductive film by providing the apparatus with a jet nozzle for injecting gaseous nitrogen to a glass substrate, heaters for heating this substrate and a heater for heating this gaseous nitrogen. ;CONSTITUTION: A vessel 26 for subjecting the glass substrate 1 formed with the metal tantalum to a thermal nitriding treatment is internally provided with the jet nozzle 22 for injecting the gaseous nitrogen 27 of a high temp. to the glass substrate 1 and the substrate heating heaters 24 for preheating the glass substrate 1. After the gaseous nitrogen 27 is controlled to a prescribed flow rate by a flow rate control valve 29, the gaseous nitrogen is heated by the gaseous nitrogen heating heater 23 and is injected as the high-temp. gaseous nitrogen 27 from the jet nozzle 22 toward the glass substrate 1. Further, the glass substrate 1 is preheated while the substrate passes between the substrate heating heaters 24 from an introducing port 25 by a glass substrate driving means installed in the vessel 26. The substrate is thereafter exposed to the high-temp. gaseous nitrogen 27, by which the surface of the metal tantalum is nitrided. The substrate is taken out of a taking out port 28 after cooling in the vessel 26.;COPYRIGHT: (C)1994,JPO
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