LIGHT TRANSMISSION TYPE VACUUM SEPARATION WINDOW AND SOFT X-RAY TRANSMISSION WINDOW

摘要

PURPOSE: To enable baking for efficiently transmitting X-rays in the soft X-ray region and forming ultra-high vacuum to be carried out by dividing the vacuum region into multiple vacuum regions with a thin film transmitting the light. ;CONSTITUTION: A soft X-ray transmission material 1 is constituted of a silicon base material 31 and a soft X-ray transmission thin film 32 made of silicon nitride. A support member 2 having an opening section is heated and coated with gallium 3, and the member 1 is stuck and supported on the member 2. Necessary baking is normally performed at 150°C to keep a decompression region A at the vacuum region of about several Torr and a ultra-vacuum region B at the vacuum region of 10^-7Torr (l.3×l0^-5 Pa) or above. Gallium 3 is melted during this baking, the stress due to the different expansion coefficients of the members 1, 2 is not applied to the thin film 32, and the thin film 32 is not broken. The vacuum of the regions B, A can be separated. The vapor pressure of gallium 3 is 10^-10Torr or below, and the ultra-high vacuum is not polluted during baking.;COPYRIGHT: (C)1994,JPO&Japio