FORMATION OF TITANIUM CARBIDE COATING FILM EXCELLENT IN WEAR RESISTANCE

摘要

PURPOSE: To establish the optimum treatment conditions at the time of forming a TiC coating film by a dynamic mixing method and to form a TiC coating film having such excellent wear resistance as to especially prevent remarkable initial wear. ;CONSTITUTION: Titanium ion implantation and titanium vapor deposition are simultaneously carried out on the surface of a substrate by a dynamic mixing method, the ratio (Ti⁺/Ti) of the number of titanium ions reaching the surface of the substrate to the number of evaporated titanium atoms reaching the surface of the substrate per unit vapor deposition time is regulated to≥1.5 and the pressure of residual gas contg. at least carbon is regulated to ≥10×10^-6Torr. The carbon in the residual gas is allowed to enter a titanium layer and the objective titanium carbide coating film excellent in wear resistance is formed on the surface of the substrate.;COPYRIGHT: (C)1994,JPO