MANUFACTURE OF BRAZED SIC DIFFRACTION GRATING

摘要

PURPOSE: To directly cut the groove of a brazed diffraction grating having an accurate saw tooth cross section into an SiC substrate. ;CONSTITUTION: After forming the mask of a diffraction grating pattern of a resist material on the surface of an SiC substrate, reactive ion beam etching is performed from an oblique direction by using a mixed gas prepared by mixing CBrF₃ and Ar so that they can satisfy a relation expressed by Ar/(CBrF₃+ Ar)=50 to 95%. Therefore, the groove of the diffraction grating pattern can be directly cut into the SiC substrate, because the etching speed of the SiC is equal to or higher than that of the resist.;COPYRIGHT: (C)1994,JPO&Japio