PROBE FOR SPM AND ITS MANUFACTURE

摘要

PURPOSE: To obtain a probe for SPM having a ≤50Å radius of curvature at its front end. ;CONSTITUTION: By irradiating the front end of the probe of a cantilever for AFM available on the market with an ion beam 24 from the axial direction of the probe and radiating an organic metal gas, such as W(CO)₆, etc., from a gas gun 23, a resolved metal is deposited in a line (B). Then a needle-like section 26 is formed by sharpening the end face of the deposited body 25 by scanning the end face with an ion beam having a diameter of ≤0.5μm within a circle of 0.5μm in diameter (D) after the end face is thinned by scanning the end face with the ion beam within a circle of 1μm in diameter (C).;COPYRIGHT: (C)1994,JPO&Japio