ALN SINTERED COMPACT EXCELLENT IN SURFACE CLEANING PROPERTY AND PRODUCTION THEREOF

摘要

PURPOSE: To improve surface cleaning property by specifying the existence ratio of an assistant reacting phase to AlN phase in the surface of an AlN sintered compact. ;CONSTITUTION: An AlN powder and a yttrium compound as a sintering assistant are mixed so that the number of moles of the yttrium compound and that of Al oxide existing on the particle surface of an AlN raw material is 0.1≤Y₂O₃/(Y₂O₃+Al₂O₃)≤0.3 expressed in terms of Y₂O₃ and Al₂O₃ and after molded, are sintered to obtain the AlN sintered compact ≤0.1 in the existence ratio of the assistant reaction phase (yttrium-aluminate phase) to AlN phase on the sintered compact surface before lapping treating in X-ray diffraction intensity ratio, I (assistant reacting phase)/I (AlN).;COPYRIGHT: (C)1994,JPO&Japio