pecvd with n epähomogeeniset grown thin films

• 1. 一种生长硅基薄膜及高效硅基薄膜太阳能电池的PECVD设备 [P] . 中国专利： CN100519835C . 2009.07.29
• 2. 一种生长硅基薄膜及高效硅基薄膜太阳能电池的PECVD设备 [P] . 中国专利： CN101220468A . 2008-07-16
• 3. pecvd with n epähomogeeniset grown thin films [P] . FI941861A . 1994-10-23

  机译： 带有n ep u00e4homogeeniset生长薄膜的pecvd

• 4. GaAs thin film grown on Si substrate, and preparation method for GaAs thin film grown on Si substrate [P] . 美国专利： US10541133B2 . 2020-01-21

  机译： 在硅衬底上生长的GaAs薄膜以及在硅衬底上生长的GaAs薄膜的制备方法

• 5. GAAS THIN FILM GROWN ON SI SUBSTRATE, AND PREPARATION METHOD FOR GAAS THIN FILM GROWN ON SI SUBSTRATE [P] . 美国专利： US2018090316A1 . 2018-03-29

  机译： 在si衬底上生长的gaas薄膜的制备方法及在si衬底上生长的gaas薄膜的制备方法

• 1. Effect of RF Power Density on Micro- and Macro-structural Properties of PECVD Grown Hydrogenated Nanocrystalline Silicon Thin Films [C] . Gozde Kahriman GOKDOGAN, Tamila ANUTGAN Balkan Physical Union., International Conference . 2016
• 2. Structurally integrated luminescence based oxygen sensors with Organic LED/oxygen sensitive dye and PECVD grown thin film photodetectors [D] . Ghosh, Debju 2008
• 3. Transfer-Free Graphene-Like Thin Films on GaN LED Epiwafers Grown by PECVD Using an Ultrathin Pt Catalyst for Transparent Electrode Applications [O] . Fangzhu Xiong, Weiling Guo, Shiwei Feng, 2019
• 4. Thin crystalline silicon solar cells based on epitaxial films grown at 165°C by RF-PECVD [O] . Romain Cariou A, Martin Labrune A, P. Roca I Cabarrocas A 2014

• 1. Influence of post-grown treatments on CuInS_2 thin films prepared by sulphurization of Cu-In films [J] . YAN Youhua LIU Yingchun FANG Ling ZHAO Haihua LI Deren LU Zhichao ZHOU Shaoxiong . 稀有金属：英文版 . 2008,第5期
• 2. Preparation and Properties of IrO_2 Thin Films Grown by Pulsed Laser Deposition Technique [J] . 公衍生 ,张联盟 . 武汉理工大学学报：材料科学英文版 . 2007,第1期
• 3. Investigation of Electrical Transport in PECVD Grown a-SiC_(x):H Thin Film [J] . Orhan Ozdemir ,Kutsal Bozkurt ,Kubilay Kutlu . 材料科学与应用期刊（英文） . 2011,第8期
• 4. The Effect of Tin on PECVD-Deposited Germanium Sulfide Thin Films for Resistive RAM Devices [J] . Rene Rodriguez ,Benjamin Poulter ,Mateo Gonzalez . 材料科学与应用期刊（英文） . 2017,第2期
• 5. Influence of substrate temperature on the deposition and structural properties of μc-Si:H thin films fabricated with VHF-PECVD [J] . YANG Hui-dongt . 光电子快报：英文版 . 2005,第1期
• 6. PECVD制备微晶硅薄膜生长过程的模拟 [C] . 陈喜平 ,陈永生 ,李新利 . 第12届中国光伏大会暨国际光伏展览会（CPVC12） . 2012
• 7. VHF-PECVD技术沉积高生长率微晶硅薄膜及薄膜的稳定性研究 [A] . 赵之雯 . 2011